Pros and Cons of Low Voltage SEM EDX Elemental Analysis
نویسندگان
چکیده
منابع مشابه
Lateral Resolution of EDX Analysis with Ultra Low Acceleration Voltage SEM
The spectral imagings were performed in order to examine the lateral resolution of the EDX analysis which is attached in an ultra low acceleration voltage SEM. The spectral imagings were performed for the cross section of the Ni coating on Al, which was cut using microtome, and the cross section of GaAs/AlAs super-lattice, which was cleavaged, using a ultra-low-acceleration-voltage SEM and EDX....
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ژورنال
عنوان ژورنال: Microscopy Today
سال: 2003
ISSN: 1551-9295,2150-3583
DOI: 10.1017/s1551929500052263